NEW XENON EXCIMER LAMPS EXCITED BY QUASI-CW JET DISCHARGES

被引：11

作者：

KAWANAKA, J ^{[1
]}

KUBODERA, S ^{[1
]}

SASAKI, W ^{[1
]}

KUROSAWA, K ^{[1
]}

MITSUHASHI, K ^{[1
]}

IGARASHI, T ^{[1
]}

机构：

[1] USHIO INC,RES & DEV,HIMEJI 67102,HYOGO,JAPAN

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 1995年 / 1卷 / 03期

关键词：

D O I：

10.1109/2944.473670

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

New xenon excimer lamps in vacuum ultraviolet (VUV) have been developed in quasi-CW jet discharges. Quantitative characteristics of xenon clusters produced with two different kinds of nozzles were studied to verify the xenon excimer formation mechanisms in jet discharges. Experimental results strongly indicate the xenon excimer emission at 174 mm as a result of the direct excitation of the xenon clusters. Output powers and pulse widths of the lamps were thus controlled by changing cluster formation parameters. The maximum output power of 1.5 W with an efficiency of 3.0% was obtained at 174 nn when the conical nozzle was used. The VUV emission lasted 5 ms (FWHM).

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页码：852 / 858

页数：7

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