NONCONVENTIONAL TECHNIQUES FOR OPTICAL LITHOGRAPHY

[1] Ross, Davis, Klemnitz, High-resolution holographic image projection at visible and ultraviolet wavelengths, Applied Optics, 27, (1988)

[2] Dandliker, Brook, I.E.E. Conf. Proc. Holographic Systems, pp. 127-132, (1989)

[3] Brook, Dandliker, Microelectron. Eng., 11, pp. 127-131, (1990)

[4] Chen, Aye, Sadovnik, Pelka, Jannson, Proc. SPIE, 1264, (1990)

[5] Stetson, Appl. Phys. Lett., 11, (1967)

[6] Clube, Gray, Struchen, Tisserand, Holographic mask aligner, Optical Engineering, 32, pp. 2403-2409, (1993)

[7] Hugle, Lens array photolithography, (1993)

[8] Beesley, Foster, Hambleton, Holographic projection of microcircuit patterns, Electronics Letters, 4, pp. 49-50, (1968)

[9] Weber, Smothers, Trout, Mickish, Proc. SPIE, 1212, pp. 30-39, (1990)

[10] Winthrop, Worthington, Theory of Fresnel Images I Plane Periodic Objects in Monochromatic Light, Journal of the Optical Society of America, 55, pp. 373-382, (1965)

[1] Ross, Davis, Klemnitz, High-resolution holographic image projection at visible and ultraviolet wavelengths, Applied Optics, 27, (1988)

[2] Dandliker, Brook, I.E.E. Conf. Proc. Holographic Systems, pp. 127-132, (1989)

[3] Brook, Dandliker, Microelectron. Eng., 11, pp. 127-131, (1990)

[4] Chen, Aye, Sadovnik, Pelka, Jannson, Proc. SPIE, 1264, (1990)

[5] Stetson, Appl. Phys. Lett., 11, (1967)

[6] Clube, Gray, Struchen, Tisserand, Holographic mask aligner, Optical Engineering, 32, pp. 2403-2409, (1993)

[7] Hugle, Lens array photolithography, (1993)

[8] Beesley, Foster, Hambleton, Holographic projection of microcircuit patterns, Electronics Letters, 4, pp. 49-50, (1968)

[9] Weber, Smothers, Trout, Mickish, Proc. SPIE, 1212, pp. 30-39, (1990)

[10] Winthrop, Worthington, Theory of Fresnel Images I Plane Periodic Objects in Monochromatic Light, Journal of the Optical Society of America, 55, pp. 373-382, (1965)