PREPARATION OF TRANSPARENT AND CONDUCTING INDIUM OXIDE-FILMS BY SOLUTION PYROLYSIS OF DIBUTYLINDIUM THIOLATE

被引：22
作者：
NOMURA, R
MORITAKE, A
KANAYA, K
MATSUDA, H
机构：
来源：
THIN SOLID FILMS | 1988年 / 167卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(88)90515-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L27 / L29
页数：3
相关论文
共 14 条
[1]   DEPOSITION OF TIN OXIDE-FILMS FROM A DC GLOW-DISCHARGE [J].
CARLSON, DE .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (10) :1334-1337
[2]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[3]  
DISLICH H, 1984, GLASTECH BER, V57, P229
[4]  
GAESER HJ, 1977, GLASTECH BER, V50, P266
[5]  
HAGIHARA S, 1982, YOGYO-KYOKAI-SHI, V90, P9
[6]  
KANEYASU K, 1987, DENKI KAGAKU, V55, P245
[7]   TRANSPARENT CONDUCTING IN2O3 FILMS PREPARED BY THERMAL-DECOMPOSITION OF INCL3 [J].
KAWAMATA, E ;
OHSHIMA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (01) :205-206
[8]   THIN TRANSPARENT IN2O3-SN FILMS AS IR FILTERS [J].
KULASZEWICZ, S ;
JARMOC, W ;
LASOCKA, I ;
LASOCKI, Z ;
MICHALSKI, C ;
TUROWSKA, K .
THIN SOLID FILMS, 1987, 148 (01) :L55-L57
[9]   DEPOSITION OF IN2O3-SNO2 LAYERS ON GLASS SUBSTRATES USING A SPRAYING METHOD [J].
MANIFACIER, JC ;
FILLARD, JP ;
BIND, JM .
THIN SOLID FILMS, 1981, 77 (1-3) :67-80
[10]  
MIKAILOV MG, 1987, THIN SOLID FILMS, V146, pL23
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