GAS-PHASE REACTIONS AND TRANSPORT IN SILICON EPITAXY

被引：31
|
作者：
AOYAMA, T
INOUE, Y
SUZUKI, T
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 01期
关键词：
D O I：
10.1149/1.2119659
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：203 / 207
页数：5
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