GAS-PHASE REACTIONS AND TRANSPORT IN SILICON EPITAXY

被引：31

作者：

AOYAMA, T

INOUE, Y

SUZUKI, T

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 01期

关键词：

D O I：

10.1149/1.2119659

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：203 / 207

页数：5

共 16 条

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