FORMATION OF Y-BA-CU-OXIDE THIN-FILMS BY PULSED LASER DEPOSITION - A COMPARATIVE-STUDY IN THE UV, VISIBLE AND IR-RANGE

被引：51

作者：

KAUTEK, W ^{[1
]}

ROAS, B ^{[1
]}

SCHULTZ, L ^{[1
]}

机构：

[1] SIEMENS AG,RES LABS,W-8520 ERLANGEN,GERMANY

来源：

THIN SOLID FILMS | 1990年 / 191卷 / 02期

关键词：

D O I：

10.1016/0040-6090(90)90383-O

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A study of the correlation between the pulsed laser deposition process and the specific interaction of the laser light with the target material in a wide wavelength range between far-UV and near-IR was performed. Sintered YBaCuoxide targets were irradiated with laser pulses of the order of 108-109 W cm-2 to generate an energetic material beam which was collected on zirconia substrates placed nearby. Visible and IR light penetrates deeply into the targets and is converted mainly into heat. This results in abrupt evaporation, rough remnant surface features on the target and splashing on the substrate film. Less than (0.3-0.5 × 109) W cm-2 of UV light leads to incongruent evaporation with, typically, yttrium deficiency on the substrate. Above this power threshold, favourably stoichiometric and smooth films are generated by UV laser light. The observed phenomena are explained in terms of competing energy dissipation mechanisms on the target surface. © 1990.

引用

页码：317 / 334

页数：18

共 37 条

[1] NONTHERMAL DESORPTION OF MOLECULAR-IONS OF POLYATOMIC-MOLECULES INDUCED BY UV LASER-RADIATION [J].