SPATIAL-FREQUENCY DOUBLING LITHOGRAPHY (SFDL) OF PERIODIC STRUCTURES FOR INTEGRATED OPTICAL CIRCUIT TECHNOLOGY

被引:5
作者
JEWELL, TE
WHITE, DL
机构
关键词
D O I
10.1109/50.50718
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1386 / 1393
页数:8
相关论文
共 7 条
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    HENRY, CH
    SHANI, Y
    KISTLER, RC
    JEWELL, TE
    POL, V
    OLSSON, NA
    KAZARINOV, RF
    ORLOWSKY, KJ
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1989, 7 (09) : 1379 - 1385
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