DEVELOPMENT OF OPTICAL MONITOR FOR CONTROL OF THIN-FILM DEPOSITION

被引：7
作者：
POWELL, I
ZWINKELS, JCM
ROBERTSON, AR
机构：
来源：
APPLIED OPTICS | 1986年 / 25卷 / 20期
关键词：
D O I：
10.1364/AO.25.003645
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：3645 / 3652
页数：8
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