CHARACTERIZATION OF PLASMA-DEPOSITED MICROCRYSTALLINE SILICON

被引：0
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作者：
MISHIMA, Y
MIYAZAKI, S
HIROSE, M
OSAKA, Y
机构：
来源：
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1982年 / 46卷 / 01期
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D O I：
10.1080/13642818208246419
中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：1 / 12
页数：12
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