DETERMINATION OF THE HYDROGEN DIFFUSION-COEFFICIENT IN HYDROGENATED AMORPHOUS-SILICON FROM HYDROGEN EFFUSION EXPERIMENTS

被引：165
作者：
BEYER, W
WAGNER, H
机构：
[1] Institut für Grenzflächenforschung und Vakuumphysik, Kernforschungsanlage Jülich, D-5170 Jülich, Germany
来源：
JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 12期
关键词：
D O I：
10.1063/1.330474
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：8745 / 8750
页数：6
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