DEFINED CRYSTAL ORIENTATION OF NICKEL BY CONTROLLED MICROELECTROPLATING

Controlled microelectroplating allows the fabrication of microstructures of nickel with defined crystal orientation within the LIGA process. The change in the crystal orientation due to different wetting agents and current densities in the electroplating process has been examined by x-ray diffraction. A careful adjustment of these parameters leads to the electrodeposition of nickel with perfect [110] and [100] orientations or the electrodeposition of nickel with a complete isotropic orientation. The defined crystal orientation permits the control of the magnetic properties of the materials for microactuators based on electromagnetic principles. A new method of analysis has been developed, which results in a quick and easy determination of the crystal orientation by the use of x-ray spectra obtained with a conventional powder diffractometer without the necessity for a special apparatus for texture analysis.