TITANIUM DISILICIDE FORMATION BY SPUTTERING OF TITANIUM ON HEATED SILICON SUBSTRATE

被引：15
|
作者：
TANIELIAN, M
BLACKSTONE, S
机构：
来源：
APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 06期
关键词：
D O I：
10.1063/1.95352
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：673 / 675
页数：3
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