OPTICAL-PROPERTIES OF CU FILMS DEPOSITED USING ION ASSISTED DEPOSITION

被引：8
|
作者：
ALJUMAILY, GA
WILSON, SR
DEHAINAUT, LL
MCNALLY, JJ
MCNEIL, JR
机构：
[1] UNIV NEW MEXICO,ALBUQUERQUE,NM 87131
[2] USAF ACAD,DEPT PHYS,COLORADO SPRINGS,CO 80840
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574486
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1909 / 1910
页数：2
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