EXTREMELY RAPID OUT DIFFUSION OF SULFUR IN INP

被引：9
作者：
CHIN, AK
CAMLIBEL, I
SHENG, TT
BONNER, WA
机构：
来源：
APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 05期
关键词：
D O I：
10.1063/1.94364
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：495 / 497
页数：3
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SHAW D, 1973, ATOMIC DIFFUSION SEM, P46
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