THE INFLUENCE OF SURFACE RECONSTRUCTION ON THE INITIAL-STAGES OF SILICON MOLECULAR-BEAM EPITAXY

被引:6
|
作者
GOSSMANN, HJ
FELDMAN, LC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 04期
关键词
D O I
10.1116/1.583215
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1065 / 1066
页数:2
相关论文
共 50 条
  • [41] GROWTH-PROCESSES IN THE INITIAL-STAGES OF DEPOSITION OF GE FILMS ON (100)SI SURFACES BY GEH4 SOURCE MOLECULAR-BEAM EPITAXY
    KOIDE, Y
    ZAIMA, S
    OHSHIMA, N
    YASUDA, Y
    JOURNAL OF CRYSTAL GROWTH, 1990, 99 (1-4) : 254 - 258
  • [42] LOW-TEMPERATURE SURFACE CLEANING OF SAPPHIRE FOR SILICON MOLECULAR-BEAM EPITAXY
    HANAFUSA, H
    OGATA, H
    YONEDA, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (03) : C96 - C96
  • [43] SURFACE PREPARATION FOR MOLECULAR-BEAM EPITAXY (MBE)
    SASSE, E
    CASEL, A
    KIBBEL, H
    FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1987, 329 (2-3): : 329 - 390
  • [44] Initial stages of molecular-beam epitaxy growth of GaN on 6H-SiC(0001)
    Lu, J
    Haworth, L
    Westwood, DI
    Macdonald, JE
    APPLIED PHYSICS LETTERS, 2001, 78 (08) : 1080 - 1082
  • [45] MOLECULAR-BEAM EPITAXY - SURFACE AND KINETIC EFFECTS
    FOXON, CT
    CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1981, 10 (03): : 235 - 242
  • [46] LOW-TEMPERATURE EPITAXY OF SILICON BY MOLECULAR-BEAM EPITAXY (MBE)
    KASPER, E
    1980, 53 (4-5): : 170 - 176
  • [47] INDUSTRIAL-ASPECTS OF SILICON MOLECULAR-BEAM EPITAXY
    KIBBEL, H
    KASPER, E
    VACUUM, 1990, 41 (4-6) : 929 - 932
  • [48] SILICON MOLECULAR-BEAM EPITAXY - STATUS - DEVICES - TRENDS
    KASPER, E
    JOURNAL DE PHYSIQUE, 1988, 49 (C-4): : 347 - 355
  • [49] PARTICULATE CONTAMINATION IN SILICON GROWN BY MOLECULAR-BEAM EPITAXY
    PINDORIA, G
    HOUGHTON, RF
    HOPKINSON, M
    WHALL, T
    KUBIAK, RAA
    PARKER, EHC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (01): : 21 - 27
  • [50] Properties of silicon nanowhiskers grown by molecular-beam epitaxy
    Naumova, Olga V.
    Nastaushev, Yuri V.
    Svitasheva, Svetlana N.
    Sokolov, Leonid V.
    Werner, Peter
    Zakharov, Nikolay D.
    Gavrilova, Tatyana A.
    Dultsev, Fedor N.
    Aseev, Alexander L.
    PHYSICS OF SEMICONDUCTORS, PTS A AND B, 2007, 893 : 739 - +