EXPERIMENTAL TESTS OF NON-THERMAL EFFECT FOR PULSED-LASER ANNEALING BY TIME-RESOLVED REFLECTIVITY AND ELECTRON-PARAMAGNETIC-RES MEASUREMENTS

被引：13
作者：
MURAKAMI, K [1 ]
MASUDA, K [1 ]
AOYAGI, Y [1 ]
NAMBA, S [1 ]
机构：
[1] INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN
来源：
PHYSICA B & C | 1983年 / 116卷 / 1-3期
关键词：
D O I：
10.1016/0378-4363(83)90308-X
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：564 / 569
页数：6
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