ORIENTATION OF ONE-DIMENSIONAL SILICON BACKBONES IN TERNARY SICH FILMS PREPARED BY EVAPORATION OF ORGANOPOLYSILANE

Ternary Si : C : H films are prepared by evaporating the organopolysilane powder. The obtained films contain a large amount of one-dimensional silicon backbones having an alternating trans-gauche conformation. The chains in the film prepared at 520 K tend to be perpendicular to the substrate surface, whereas, those prepared at 650 K are mostly inclined from the surface normal direction. In both cases, one of the lattice planes becomes parallel to the substrate surface.