MICROTRANSPORT INDUCED BY ULTRASONIC LAMB WAVES

被引：129
作者：
MORONEY, RM [1 ]
WHITE, RM [1 ]
HOWE, RT [1 ]
机构：
[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720
来源：
APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 07期
关键词：
D O I：
10.1063/1.105339
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have observed pumping of water induced by 4.7 MHz ultrasonic Lamb waves traveling in a 4-mu-m-thick composite membrane of silicon nitride and piezoelectric zinc oxide. The observed pumping speed is proportional to the square of the wave amplitude; the speed was 100-mu-m/s for a rf drive voltage of 8 V and a 6.5 nm wave amplitude. A nonlinear model based on acoustic streaming theory predicts velocities in good agreement with experiment.
引用
收藏
页码：774 / 776
页数：3
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