TIO2, LINB3O8, AND (TIXNB1-X)O2 COMPOUND KINETICS DURING TI-LINBO3 WAVE-GUIDE FABRICATION IN THE PRESENCE OF WATER VAPORS

被引:59
作者
DESARIO, M
ARMENISE, MN
CANALI, C
CARNERA, A
MAZZOLDI, P
CELOTTI, G
机构
[1] DIPARTIMENTO FIS,I-35100 PADOVA,ITALY
[2] CNR,IST LAMEL,I-40126 BOLOGNA,ITALY
关键词
D O I
10.1063/1.334459
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1482 / 1488
页数:7
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