A MULTILAYER PROCESS FOR THE FABRICATION OF HTSC FLUX TRANSFORMERS AND SQUIDS

被引：17

作者：

DAVID, BR ^{[1
]}

GRUNDLER, D ^{[1
]}

ECKART, R ^{[1
]}

FANGHANEL, K ^{[1
]}

KRUMME, JP ^{[1
]}

DOORMANN, V ^{[1
]}

DOSSEL, O ^{[1
]}

机构：

[1] UNIV HAMBURG,INST ANGEW PHYS,D-20355 HAMBURG,GERMANY

来源：

SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 1994年 / 7卷 / 05期

关键词：

D O I：

10.1088/0953-2048/7/5/015

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A multi-layer technology, based on YBaCuO as the superconducting material and SrTiO3 as the insulating material, is described. Patterning is performed by photolithography and Ar-ion-beam etching under flat incidence. Using a resist bake-out prior to the etching, step angles in the patterned lower film of less than 20-degrees are obtained. Superconducting 10-turn thin-film coils have been fabricated with transition temperatures of up to 83 K and critical current densities at 77 K of 2 x 10(5) A cm-2 . Furthermore we have fabricated a thin-film flux transformer and combined it in flip-chip configuration with a low-noise YBCO step-edge DC SQUID. We measured a magnetic field resolution of the complete magnetometer of 200 fT Hz-1/2 at 1 Hz, dominated by the SQUID noise itself.

引用

页码：287 / 289

页数：3

共 3 条

[1] HIGHLY SENSITIVE YBA2CU3O7 DC SQUID MAGNETOMETER WITH THIN-FILM FLUX TRANSFORMER [J].