SILENT-DISCHARGE DRIVEN EXCIMER UV SOURCES AND THEIR APPLICATIONS

被引：154
作者：
KOGELSCHATZ, U
机构：
[1] Asea Brown Boveri Corporate Research
来源：
APPLIED SURFACE SCIENCE | 1992年 / 54卷
关键词：
D O I：
10.1016/0169-4332(92)90080-H
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The generation of incoherent excimer radiation at different ultraviolet (UV) and vacuum ultraviolet (VUV) wavelengths in silent electrical discharges (dielectric-barrier discharges) is discussed. Different geometrical discharge configurations including windowless VUV sources are presented. Applications of these UV sources include photodeposition techniques for metal, dielectric or semiconductor layers, surface modification as well as patterned material removal for the microstructuring of large-area polymer surfaces.
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页码：410 / 423
页数：14
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