TEMPERATURE DISTRIBUTION DURING HEATING USING A HIGH REPETITION RATE PULSED LASER

被引：26

作者：

HABA, B

HUSSEY, BW

GUPTA, A

机构：

[1] IBM Thomas J. Watson Research Center, Yorktown Heights

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 05期

关键词：

D O I：

10.1063/1.348595

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A general equation has been derived for computing the temperature distribution produced in a substrate heated by a high repetition rate pulsed laser. The theoretical predictions have been compared with experimental results obtained for etching of Mn-Zn ferrite in KOH solution using a copper vapor laser. The effects of the laser power and substrate scan speed on the temperature distribution have been investigated, and the predicted melt-zone boundaries have been compared with the experimentally observed width, depth, and shape of the etched grooves.

引用

页码：2871 / 2876

页数：6

共 7 条

[1] BAUERLE D, 1986, CHEM PROCESSING LASE, V1
[2] CARSLAW HS, 1959, CONDUCTION HEAT SOLI, P371
[3] TEMPERATURE RISE INDUCED BY A LASER-BEAM
LAX, M
[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (09) : 3919 - 3924
[4] LASER-INDUCED METAL-DEPOSITION ON SEMICONDUCTORS FROM LIQUID ELECTROLYTES
NANAI, L
HEVESI, I
BUNKIN, FV
LUKYANCHUK, BS
BROOK, MR
SHAFEEV, GA
JELSKI, DA
WU, ZC
GEORGE, TF
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (08) : 736 - 738
[5] TEMPERATURE DISTRIBUTIONS PRODUCED BY SCANNING GAUSSIAN LASER-BEAMS
SANDERS, DJ
[J]. APPLIED OPTICS, 1984, 23 (01): : 30 - 35
[6] VONALLMEN M, 1986, LASER BEAM INTERACTI, V2
[7] LASER-ASSISTED ETCHING OF MANGANESE-ZINC-FERRITE
YUNG, EK
HUSSEY, BW
GUPTA, A
ROMANKIW, LT
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (03) : 665 - 673

← 1 →