AN INTERFEROMETRIC ANGULAR AND LINEAR DISPLACEMENT SENSOR

被引：0
|
作者：
ILIN, VN
机构：
来源：
MEASUREMENT TECHNIQUES USSR | 1988年 / 31卷 / 02期
关键词：
D O I：
10.1007/BF00864242
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：115 / 117
页数：3
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