Automatic mask alignment in the theta direction using moire sensors

被引：8
|
作者：
Liu, J
Furuhashi, H
Torii, A
Sharma, R
Chitnis, VT
Singh, BP
Yamada, J
Uchida, Y
机构：
[1] NATL PHYS LAB,NEW DELHI 110012,INDIA
[2] NAGOYA UNIV,CHIKUSA KU,NAGOYA,AICHI 46401,JAPAN
来源：
NANOTECHNOLOGY | 1995年 / 6卷 / 04期
关键词：
D O I：
10.1088/0957-4484/6/4/005
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Automatic mask alignment in the theta direction using moire sensors is reported, The relation between small angular displacement and linear displacement is clarified. A computer-controlled angular alignment system is developed. A desired alignment position is easily set by a computer. In our experimental condition, angular accuracy of the order of +/-4 x 10(-7) rad is realized by automatic computer control.
引用
收藏
页码：135 / 138
页数：4
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