GOLD-FILMS ON SILICON - ION-BOMBARDMENT-INDUCED REACTIONS BETWEEN GOLD AND SILICON

被引：3

作者：

KOMISSAROV, A

KHEYRANDISH, H

ALTAMIMI, ZY

机构：

来源：

THIN SOLID FILMS | 1986年 / 137卷 / 02期

关键词：

D O I：

10.1016/0040-6090(86)90028-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：267 / 279

页数：13

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[1] INTERACTION OF THIN GOLD-FILMS WITH SILICON
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[8] DIFFUSION AND REACTIONS IN GOLD-FILMS
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[9] EFFECT OF ION-BOMBARDMENT ON THE DIFFUSION OF GOLD IN SILICON
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[10] SPECIAL HIGH-ANGLE BOUNDARIES IN GOLD-FILMS ON SILICON
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