SUPERCONDUCTING YBA2CU3O7 THIN-FILMS ON MGO BY KRF LASER ABLATION - OPTIMIZATION OF DEPOSITION PARAMETERS

被引：24

作者：

SAKEEK, HF

HIGGINS, M

GRAHAM, WG

MORROW, T

TURNER, RJ

WALMSLEY, DG

机构：

[1] Department of Pure and Applied Physics, Queen's University

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 70卷 / 04期

关键词：

D O I：

10.1063/1.349398

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The optimization of interrelated deposition parameters during deposition of in situ YBa2Cu3O7 thin films on MgO <001> substrates by KrF laser ablation was systematically studied in a single experimental chamber. The optimum condition was found to be a substrate temperature of 720-degrees-C and a target-substrate distance of 5 cm in an oxygen partial pressure of 100 mTorr. These conditions produced films with T(c) = 87 K. The presence of YO in the plasma plume was found to be important in producing good quality films. The films were characterized by resistance-temperature measurements, energy dispersive x-ray analyses, scanning electron microscopy, and x-ray-diffraction measurements, and the physical reasons underlying film quality degradation at parameter values away from optimal are discussed.

引用

页码：2455 / 2457

页数：3