SUPERCONDUCTING YBA2CU3O7 THIN-FILMS ON MGO BY KRF LASER ABLATION - OPTIMIZATION OF DEPOSITION PARAMETERS

被引：24
作者：
SAKEEK, HF
HIGGINS, M
GRAHAM, WG
MORROW, T
TURNER, RJ
WALMSLEY, DG
机构：
[1] Department of Pure and Applied Physics, Queen's University
来源：
JOURNAL OF APPLIED PHYSICS | 1991年 / 70卷 / 04期
关键词：
D O I：
10.1063/1.349398
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The optimization of interrelated deposition parameters during deposition of in situ YBa2Cu3O7 thin films on MgO <001> substrates by KrF laser ablation was systematically studied in a single experimental chamber. The optimum condition was found to be a substrate temperature of 720-degrees-C and a target-substrate distance of 5 cm in an oxygen partial pressure of 100 mTorr. These conditions produced films with T(c) = 87 K. The presence of YO in the plasma plume was found to be important in producing good quality films. The films were characterized by resistance-temperature measurements, energy dispersive x-ray analyses, scanning electron microscopy, and x-ray-diffraction measurements, and the physical reasons underlying film quality degradation at parameter values away from optimal are discussed.
引用
收藏
页码：2455 / 2457
页数：3
相关论文
共 12 条
[1]   DYNAMICS OF EXCIMER LASER ABLATION OF SUPERCONDUCTORS IN AN OXYGEN ENVIRONMENT [J].
DYER, PE ;
ISSA, A ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1990, 57 (02) :186-188
[2]   DEPOSITION OF HIGH-TC YBACUO AND BISRCACUO SUPERCONDUCTING THIN-FILMS BY PULSED EXCIMER LASER EVAPORATION [J].
FOGARASSY, E ;
FUCHS, C ;
SIFFERT, P ;
PERRIERE, J ;
WANG, XZ ;
ROCHET, F .
SOLID STATE COMMUNICATIONS, 1988, 67 (10) :975-979
[3]   SPECTRAL CHARACTERISTICS OF PLASMA EMISSION DURING ARF EXCIMER LASER ABLATION OF YBA2CU3O7 [J].
GEYER, TJ ;
WEIMER, WA .
APPLIED PHYSICS LETTERS, 1989, 54 (05) :469-471
[4]   ROLE OF ATOMIC OXYGEN IN THE LOW-TEMPERATURE GROWTH OF YBA2CU3O7-DELTA THIN-FILMS BY LASER ABLATION DEPOSITION [J].
KOREN, G ;
GUPTA, A ;
BASEMAN, RJ .
APPLIED PHYSICS LETTERS, 1989, 54 (19) :1920-1922
[5]   LASER WAVELENGTH DEPENDENT PROPERTIES OF YBA2CU3O7-DELTA THIN-FILMS DEPOSITED BY LASER ABLATION [J].
KOREN, G ;
GUPTA, A ;
BASEMAN, RJ ;
LUTWYCHE, MI ;
LAIBOWITZ, RB .
APPLIED PHYSICS LETTERS, 1989, 55 (23) :2450-2452
[6]   EPITAXIAL-GROWTH OF YBA2CU3O7-X THIN-FILMS BY A LASER EVAPORATION PROCESS [J].
ROAS, B ;
SCHULTZ, L ;
ENDRES, G .
APPLIED PHYSICS LETTERS, 1988, 53 (16) :1557-1559
[7]   REDUCTION IN MAGNETIC-FIELD INDUCED BROADENING OF THE RESISTIVE TRANSITION IN LASER-DEPOSITED YBA2CU3O7-X THIN-FILMS ON MGO [J].
ROGERS, CT ;
GREGORY, S ;
VENKATESAN, T ;
WILKENS, BJ ;
WU, XD ;
INAM, A ;
DUTTA, B ;
HEGDE, MS .
APPLIED PHYSICS LETTERS, 1989, 54 (20) :2038-2040
[8]   INSITU PROCESSING OF EPITAXIAL Y-BA-CU-O HIGH-TC SUPERCONDUCTING FILMS ON (100) SRTIO3 AND (100) YS-ZRO2 SUBSTRATES AT 500-650-DEGREES-C [J].
SINGH, RK ;
NARAYAN, J ;
SINGH, AK ;
KRISHNASWAMY, J .
APPLIED PHYSICS LETTERS, 1989, 54 (22) :2271-2273
[9]   DEPOSITION OF SUPERCONDUCTING Y-BA-CU-O FILMS AT 400-DEGREES-C WITHOUT POST-ANNEALING [J].
WITANACHCHI, S ;
KWOK, HS ;
WANG, XW ;
SHAW, DT .
APPLIED PHYSICS LETTERS, 1988, 53 (03) :234-236
[10]   OPTICAL SPECTROSCOPY - AN INSITU DIAGNOSTIC FOR PULSED LASER DEPOSITION OF HIGH-TC SUPERCONDUCTING THIN-FILMS [J].
WU, XD ;
DUTTA, B ;
HEGDE, MS ;
INAM, A ;
VENKATESAN, T ;
CHASE, EW ;
CHANG, CC ;
HOWARD, R .
APPLIED PHYSICS LETTERS, 1989, 54 (02) :179-181
12