ELECTRORESISTANCE AND STRUCTURE OF HAFNIUM FILMS OBTAINED IN A DISCHARGE WITH OSCILLATING ELECTRONS

被引：0
作者：
KOZLOVSKII, LV
REIKHRUDEL, EM
SMIRNITSKAYA, GV
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ZHURNAL TEKHNICHESKOI FIZIKI | 1982年 / 52卷 / 07期
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O59 [应用物理学];
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页码：1448 / 1450
页数：3
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