COLLIMATED MAGNETRON SPUTTER-DEPOSITION WITH GRAZING ANGLE ION-BOMBARDMENT

被引：15
|
作者：
ROSSNAGEL, SM [1 ]
SWARD, R [1 ]
机构：
[1] IBM CORP,DIV MICROELECTR,FISHKILL,NY 12524
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 01期
关键词：
D O I：
10.1116/1.579433
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：156 / 158
页数：3
相关论文
共 50 条
  • [31] THE INFLUENCE OF ION-BOMBARDMENT ON DEPOSITION OF CARBON-FILMS
    PADMANABHAN, KR
    CHEVALLIER, J
    SORENSEN, G
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 16 (4-5): : 369 - 372
  • [32] COLLIMATED SPUTTER-DEPOSITION, A NOVEL METHOD FOR LARGE-AREA DEPOSITION OF SPINDT TYPE FIELD-EMISSION TIPS
    VANVEEN, GNA
    THEUNISSEN, B
    VANDEHEUVEL, K
    HORNE, R
    BURGMANS, ALJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02): : 478 - 481
  • [33] MICROCRYSTALLINE SILICON THIN-FILMS PREPARED BY RF REACTIVE MAGNETRON SPUTTER-DEPOSITION
    CERQUEIRA, MF
    ANDRITSCHKY, M
    REBOUTA, L
    FERREIRA, JA
    DASILVA, MF
    VACUUM, 1995, 46 (12) : 1385 - 1390
  • [34] IONIZED MAGNETRON SPUTTER-DEPOSITION OF AMORPHOUS-CARBON NITRIDE THIN-FILMS
    LI, D
    LOPEZ, S
    CHUNG, YW
    WONG, MS
    SPROUL, WD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1995, 13 (03): : 1063 - 1066
  • [35] Source optimization for magnetron sputter-deposition of NbTiN tuning elements for SIS THz detectors
    Iosad, NN
    Jackson, BD
    Ferro, F
    Gao, JR
    Polyakov, SN
    Dmitriev, PN
    Klapwijk, TM
    SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1999, 12 (11): : 736 - 740
  • [36] ION-BOMBARDMENT EFFECTS ON THE NEAR-SURFACE COMPOSITION DURING SPUTTER PROFILING
    LAM, NQ
    SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) : 65 - 77
  • [37] SOLID LUBRICATING FILMS PRODUCED BY ION-BOMBARDMENT OF SPUTTER DEPOSITED MOSX FILMS
    MIKKELSEN, NJ
    SORENSEN, G
    SURFACE & COATINGS TECHNOLOGY, 1992, 51 (1-3): : 118 - 123
  • [38] SPUTTER REDUCTION OF OXIDES BY ION-BOMBARDMENT DURING AUGER DEPTH PROFILE ANALYSIS
    MITCHELL, DF
    SPROULE, GI
    GRAHAM, MJ
    SURFACE AND INTERFACE ANALYSIS, 1990, 15 (08) : 487 - 497
  • [39] Low temperature magnetron sputter deposition of polycrystalline silicon thin films using high flux ion bombardment
    Gerbi, Jennifer E.
    Abelson, John R.
    Journal of Applied Physics, 2007, 101 (06):
  • [40] ON THE ION-BOMBARDMENT INDUCED CONE-PYRAMID APEX ANGLE
    TANOVIC, LA
    JOURNAL OF MATERIALS SCIENCE, 1981, 16 (11) : 3021 - 3024
12345