HEAVY-ION DAMAGE IN SILICON AND GERMANIUM

被引：57
|
作者：
HOWE, LM
RAINVILLE, MH
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷
关键词：
D O I：
10.1016/S0168-583X(87)80015-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：61 / 66
页数：6
相关论文
共 50 条
  • [21] Regrowth of heavy-ion implantation damage by electron beams
    Jencic, I
    Robertson, IM
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2000, 3 (04) : 311 - 315
  • [22] ALL EPITAXIAL SILICON DIODE HEAVY-ION DETECTOR
    GRUHN, CR
    GOLDSTONE, PD
    JARMIE, N
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1977, 24 (01) : 142 - 147
  • [23] HEAVY-ION IRRADIATION DAMAGE IN CARBON STRIPPER FOILS
    DOLLINGER, G
    MAIERKOMOR, P
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1989, 282 (01): : 223 - 235
  • [24] HIGH-ENERGY HEAVY-ION IRRADIATION OF SILICON
    TOULEMONDE, M
    DURAL, J
    NOUET, G
    MARY, P
    HAMET, JF
    BEAUFORT, MF
    DESOYER, JC
    BLANCHARD, C
    AULEYTNER, J
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1989, 114 (02): : 467 - 473
  • [25] Disorder induced in silicon carbide by heavy-ion irradiation
    Costantini, Jean-Marc
    PHILOSOPHICAL MAGAZINE LETTERS, 2021, 101 (05) : 185 - 191
  • [26] Structural modifications of low-energy heavy-ion irradiated germanium
    Steinbach, T.
    Wernecke, J.
    Kluth, P.
    Ridgway, M. C.
    Wesch, W.
    PHYSICAL REVIEW B, 2011, 84 (10)
  • [27] SOME REMARKS ON HEAVY-ION ACCELERATION AND HEAVY-ION ACCELERATORS
    SCHMELZER, C
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1972, NS19 (02) : 16 - +
  • [28] Modeling of heavy-ion collisions at the relativistic heavy-ion collider
    Bass, Steffen A.
    Nonaka, Chiho
    INTERNATIONAL JOURNAL OF MODERN PHYSICS E, 2007, 16 (03): : 729 - 741
  • [29] ON FOCUSING OF HEAVY-ION BEAMS TO A TARGET FOR HEAVY-ION FUSION
    GARREN, A
    KRAFFT, G
    HABER, I
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (02): : 118 - 118
  • [30] PRIMARY DAMAGE AND SECONDARY-ELECTRON DAMAGE IN HEAVY-ION TRACKS IN PLASTICS
    PARETZKE, HG
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 34 (1-3): : 3 - 8
12345