PERSPECTIVES ON METAL ORGANIC VAPOR-PHASE EPITAXY GROWTH - CHEMISTRY, STRUCTURES AND SYSTEMS

The development of the metal organic vapor phase epitaxy (MOVPE) process has, until recently, been the result of the application of systematic empirical study. The MOVPE technique, as currently developed, has been successful in producing a large variety of important device structures. More aggressive materials structures required in the next generations of electronic and optical devices depend on the extension of the MOVPE technique beyond the realm achieved under the existing mode of process development. The future development of the technique will have to result from the application of an understanding of the basic underlying MOVPE chemistry, the establishment of useful models of the growth environment, and in situ monitoring and process control.