HETEROEPITAXY OF GAAS ON SI AND GE USING ALTERNATING, LOW-ENERGY ION-BEAMS

被引:20
|
作者
HAYNES, TE
ZUHR, RA
PENNYCOOK, SJ
APPLETON, BR
机构
关键词
D O I
10.1063/1.100690
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1439 / 1441
页数:3
相关论文
共 50 条
  • [1] HETEROEPITAXY OF GAAS ON SI AND GE BY LOW-ENERGY ION-BEAM DEPOSITION USING ALTERNATING BEAMS
    HAYNES, TE
    ZUHR, RA
    PENNYCOOK, SJ
    ADVANCES IN MATERIALS, PROCESSING AND DEVICES IN III-V COMPOUND SEMICONDUCTORS, 1989, 144 : 311 - 316
  • [2] LOW-ENERGY ION-BEAMS
    STEPHENS, KG
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (01): : 13 - 14
  • [3] CHEMICAL ROUTES TO GAAS ETCHING WITH LOW-ENERGY ION-BEAMS
    TYRRELL, GC
    MARSHALL, D
    BECKMAN, J
    JACKMAN, RB
    JOURNAL OF PHYSICS-CONDENSED MATTER, 1991, 3 : S179 - S186
  • [4] APPLICATION OF LOW-ENERGY ION-BEAMS
    BRUNNER, G
    ROSSIGER, V
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 3 (1-3): : 275 - 278
  • [5] THE ION OPTICS OF LOW-ENERGY ION-BEAMS
    DRUMMOND, IW
    VACUUM, 1984, 34 (1-2) : 51 - 61
  • [6] DEFECT STUDY IN GAAS BOMBARDED BY LOW-ENERGY FOCUSED ION-BEAMS
    GAMO, K
    MIYAKE, H
    YUBA, Y
    NAMBA, S
    KASAHARA, H
    SAWARAGI, H
    AIHARA, R
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2124 - 2127
  • [7] STUDIES OF SURFACES OF MATERIALS USING LOW-ENERGY ION-BEAMS
    TSONG, IST
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (02) : 1266 - 1270
  • [8] PROBING INTERATOMIC POTENTIALS USING LOW-ENERGY ION-BEAMS
    MATHUR, D
    CURRENT SCIENCE, 1993, 65 (04): : 312 - 318
  • [9] VLF AMPLIFICATION BY LOW-ENERGY ION-BEAMS
    LIEMOHN, HR
    TRANSACTIONS-AMERICAN GEOPHYSICAL UNION, 1973, 54 (04): : 422 - &
  • [10] THE INTERACTION OF LOW-ENERGY ION-BEAMS WITH SURFACES
    CARTER, G
    ARMOUR, DG
    THIN SOLID FILMS, 1981, 80 (1-3) : 13 - 30