DEPTH RESOLUTION IN SPUTTER PROFILING

被引：87
|
作者：
HOFMANN, S [1 ]
机构：
[1] MAX PLANCK INST MET FORSCH,INST WERKSTOFFWISSENSCH,D-7000 STUTTGART 1,FED REP GER
来源：
APPLIED PHYSICS | 1977年 / 13卷 / 02期
关键词：
D O I：
10.1007/BF00882481
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：205 / 207
页数：3
相关论文
共 50 条
  • [1] DEPTH RESOLUTION OF SPUTTER PROFILING
    ANDERSEN, HH
    APPLIED PHYSICS, 1979, 18 (02): : 131 - 140
  • [2] THE DEPTH RESOLUTION OF SPUTTER PROFILING
    KING, BV
    TSONG, IST
    ULTRAMICROSCOPY, 1984, 14 (1-2) : 75 - 78
  • [3] THE DEPTH DEPENDENCE OF THE DEPTH RESOLUTION IN SPUTTER PROFILING
    WERNER, HW
    SURFACE AND INTERFACE ANALYSIS, 1982, 4 (01) : 1 - 7
  • [4] Depth resolution in sputter profiling revisited
    Hofmann, S.
    Liu, Y.
    Jian, W.
    Kang, H. L.
    Wang, J. Y.
    SURFACE AND INTERFACE ANALYSIS, 2016, 48 (13) : 1354 - 1369
  • [5] ON THE ESTIMATION OF DEPTH RESOLUTION DURING SPUTTER PROFILING
    PETRAVIC, M
    SVENSSON, BG
    WILLIAMS, JS
    APPLIED PHYSICS LETTERS, 1993, 62 (03) : 278 - 280
  • [6] INFLUENCE OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING
    CHENG, YT
    DOW, AA
    CLEMENS, BM
    CIRLIN, EH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1641 - 1645
  • [7] EFFECT OF ION MIXING ON THE DEPTH RESOLUTION OF SPUTTER DEPTH PROFILING
    CHENG, YT
    DOW, AA
    CLEMENS, BM
    APPLIED PHYSICS LETTERS, 1988, 53 (14) : 1346 - 1348
  • [8] IMPROVEMENT OF DEPTH RESOLUTION IN SPUTTER PROFILING BY COOLING SPECIMENS
    ISHIKAWA, K
    HAMASAKI, S
    GOTO, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (08): : L547 - L549
  • [9] Analytical and numerical depth resolution functions in sputter profiling
    Hofmann, S.
    Liu, Y.
    Wang, J. Y.
    Kovac, J.
    APPLIED SURFACE SCIENCE, 2014, 314 : 942 - 955
  • [10] DEPTH RESOLUTION DURING SPUTTER PROFILING OF SI IN GAAS
    PETRAVIC, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4): : 388 - 390
12345