COMPARISON OF OPTICAL WAVE-GUIDE LOSSES IN SILICON-ON-INSULATOR

被引：21
|
作者：
ZINKE, T
FISCHER, U
SPLETT, A
SCHUPPERT, B
PETERMANN, K
机构：
[1] Technische Universität, Berlin Institut für Hochfrequenztechnik, D-10587 Berlin
来源：
ELECTRONICS LETTERS | 1993年 / 29卷 / 23期
关键词：
OPTICAL WAVE-GUIDES; INTEGRATED OPTICS; SILICON-ON-INSULATOR;
D O I：
10.1049/el:19931356
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Waveguide losses in SOI (silicon-on-insulator) material fabricated by different techniques are compared thus enabling us to confirm the theoretical dependence of losses on layer thickness. Single-mode waveguide losses in BE-SOI (bond and etchback-SOI) below 0.5dB/cm are reported for waveguides with cross-sections of several square micrometres.
引用
收藏
页码：2031 / 2033
页数：3
相关论文
共 50 条
  • [41] A dual polarization optical 90°-hybrid in silicon-on-insulator waveguides
    Li, Yanping
    Hong, Tingting
    Wang, Ziyu
    OPTOELECTRONIC MATERIALS AND DEVICES V, 2011, 7987
  • [42] Analysis of the tuning sensitivity of silicon-on-insulator optical ring resonators
    Baehr-Jones, T
    Hochberg, M
    Walker, C
    Chan, E
    Koshinz, D
    Krug, W
    Scherer, A
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2005, 23 (12) : 4215 - 4221
  • [43] STUDY OF MORPHOLOGY AND STRESS OF SILICON-ON-INSULATOR BY OPTICAL REFLECTANCE SPECTROSCOPY
    LACQUET, BM
    SWART, PL
    JOURNAL OF ELECTRONIC MATERIALS, 1991, 20 (11) : 921 - 927
  • [44] Nonlinear absorption and Raman scattering in silicon-on-insulator optical waveguides
    Liang, TK
    Tsang, HK
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2004, 10 (05) : 1149 - 1153
  • [45] HELIUM ION-IMPLANTED OPTICAL WAVE-GUIDE IN KTIOPO(4)
    ZHANG, L
    CHANDLER, PJ
    TOWNSEND, PD
    THOMAS, PA
    ELECTRONICS LETTERS, 1992, 28 (07) : 650 - 652
  • [46] COMPUTER-AIDED-DESIGN SYSTEM FOR OPTICAL WAVE-GUIDE DEVICES
    TERVONEN, A
    OPTICAL ENGINEERING, 1995, 34 (09) : 2543 - 2550
  • [47] Integrated Optical Hydrogen and Temperature Sensor on Silicon-on-Insulator Platform
    Alam, M. Z.
    Carriere, N.
    Mojahedi, Mo
    Aitchison, J. S.
    PHOTONICS APPLICATIONS FOR AVIATION, AEROSPACE, COMMERCIAL, AND HARSH ENVIRONMENTS V, 2014, 9202
  • [48] PROPAGATION LOSSES IN A POTASSIUM-ION-EXCHANGED WAVE-GUIDE WITH A SUPERSTRATE
    HELLESO, OG
    BENECH, P
    RIMET, R
    APPLIED OPTICS, 1995, 34 (33): : 7702 - 7704
  • [49] Germanium photodetector integrated in a silicon-on-insulator microwaveguide
    Vivien, L.
    Rouviere, M.
    Marris-Morini, D.
    Mangeney, J.
    Crozat, P.
    Cassan, E.
    Le Roux, X.
    Laval, S.
    El Melhaoui, L.
    Damlencourt, J-F.
    Fedeli, J-M.
    2007 4TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, 2007, : 280 - +
  • [50] Silicon-on-Insulator In-Plane GiresTournois Interferometers
    St-Gelais, Raphael
    Kerrien, Thomas
    Camirand, Hubert
    Poulin, Alexandre
    Peter, Yves-Alain
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2012, 24 (24) : 2272 - 2275
12345