COMPARISON OF OPTICAL WAVE-GUIDE LOSSES IN SILICON-ON-INSULATOR

被引：21
|
作者：
ZINKE, T
FISCHER, U
SPLETT, A
SCHUPPERT, B
PETERMANN, K
机构：
[1] Technische Universität, Berlin Institut für Hochfrequenztechnik, D-10587 Berlin
来源：
ELECTRONICS LETTERS | 1993年 / 29卷 / 23期
关键词：
OPTICAL WAVE-GUIDES; INTEGRATED OPTICS; SILICON-ON-INSULATOR;
D O I：
10.1049/el:19931356
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Waveguide losses in SOI (silicon-on-insulator) material fabricated by different techniques are compared thus enabling us to confirm the theoretical dependence of losses on layer thickness. Single-mode waveguide losses in BE-SOI (bond and etchback-SOI) below 0.5dB/cm are reported for waveguides with cross-sections of several square micrometres.
引用
收藏
页码：2031 / 2033
页数：3
相关论文
共 50 条
  • [31] An optical board approach based on SOI (silicon-on-insulator)
    Bruns, Juergen
    Mitze, Torsten
    Zimmermann, Lars
    Voigt, Karsten
    Schnarrenberger, Martin
    Petermann, Klaus
    ICTON 2007: PROCEEDINGS OF THE 9TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS, VOL 1, 2007, : 179 - +
  • [32] SURFACE-MICROMACHINED EPITAXIAL SILICON CANTILEVERS AS MOVABLE OPTICAL WAVE-GUIDES ON SILICON-ON-INSULATOR SUBSTRATES
    ENG, TTH
    KAN, SC
    WONG, GKL
    SENSORS AND ACTUATORS A-PHYSICAL, 1995, 49 (1-2) : 109 - 113
  • [33] Sharply bent optical waveguide on silicon-on-insulator substrate
    Sakai, A
    Hara, G
    Baba, T
    PHYSICS AND SIMULATION OF OPTOELECTRONIC DEVICES IX, 2001, 4283 : 610 - 618
  • [34] Apodized Silicon-on-Insulator Bragg Gratings
    Simard, Alexandre D.
    Belhadj, Nezih
    Painchaud, Yves
    LaRochelle, Sophie
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2012, 24 (12) : 1033 - 1035
  • [35] Dry-etchced silicon-on-insulator waveguides with low propagation and fiber-coupling losses
    Solehmainen, K
    Aalto, T
    Dekker, J
    Kapulainen, M
    Harjanne, M
    Kukli, K
    Heimala, P
    Kolari, K
    Leskelä, M
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2005, 23 (11) : 3875 - 3880
  • [36] Integrated Silicon-on-Insulator Optical Comb Demultiplexer for Elastic Optical Networks
    Porzi, Claudio
    Nottola, Alessandro
    Tirelli, Stefano
    Preve, Giovan Battista
    Sorel, Marc
    Bogoni, Antonella
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2020, 32 (14) : 867 - 870
  • [37] Integrated MMI optical couplers and optical switches in Silicon-on-insulator technology
    Yu, JH
    Wei, HZ
    Zhang, XF
    Yan, QF
    Xia, JS
    APOC 2001: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS: OPTICAL SWITCHING AND OPTICAL INTERCONNECTION, 2001, 4582 : 57 - 62
  • [38] Propagation of Ultra-fast Femtosecond Pulses in Silicon-on-insulator Optical Waveguides
    Cristiano de Mello Gallep
    SemiconductorPhotonicsandTechnology, 2007, (04) : 261 - 267
  • [39] Silicon-on-insulator optical intensity modulator based on waveguide-vanishing effect
    Zhao, CZ
    Liu, EK
    Li, GZ
    Guo, L
    ELECTRONICS LETTERS, 1996, 32 (18) : 1667 - 1668
  • [40] Development of multi-step processing in silicon-on-insulator for optical waveguide applications
    Solehmainen, K.
    Aalto, T.
    Dekker, J.
    Kapulainen, M.
    Harjanne, M.
    Heimala, P.
    JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2006, 8 (07): : S455 - S460
12345