PREPARATION OF PBTIO3 THIN-FILMS BY AN EXCIMER LASER ABLATION TECHNIQUE WITH 2ND LASER IRRADIATION

被引：21
|
作者：
TABATA, H
MURATA, O
KAWAI, T
KAWAI, S
OKUYAMA, M
机构：
[1] OSAKA UNIV,INST SCI & IND RES,IBARAKI,OSAKA 567,JAPAN
[2] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 9B期
关键词：
LASER ABLATION; 2ND LASER IRRADIATION EFFECT; FERROELECTRIC THIN FILM; PBTIO3 THIN FILM; LOW-TEMPERATURE FORMATION;
D O I：
10.1143/JJAP.31.2968
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Ferroelectric PbTiO3 thin films have been formed on based electrodes of Pt or oxide superconductor ((La, Sr)2CuO4) by an ArF excimer laser ablation technique. A second laser irradiation at the substrate surface is quite effective in the crystallization of the films at low substrate temperature below 400-degrees-C. The suitable energy density of the irradiation laser is in the range of 30-100 mJ/cm2. X-ray diffraction patterns of PbTiO3 thin films show c-axis orientation, with FWHM (full width at half maximum) of rocking curve of 0.5-degrees-1.0-degrees. These films exhibit a ferroelectric hysteresis loop. The dielectric constant and remanent polarization of the PbTiO3 films are in the range of 120-150 and 20-25 muC/cm2, respectively.
引用
收藏
页码：2968 / 2970
页数：3
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