ULTRAHIGH DOPING LEVELS OF GAAS WITH BERYLLIUM BY MOLECULAR-BEAM EPITAXY

被引:40
|
作者
LIEVIN, JL
ALEXANDRE, F
机构
关键词
D O I
10.1049/el:19850293
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:413 / 414
页数:2
相关论文
共 50 条
  • [21] MOLECULAR-BEAM EPITAXY WITH IONIZED BEAM DOPING
    MATSUNAGA, N
    NAGANUMA, M
    TAKAHASHI, K
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 : 443 - 449
  • [22] A NEW SI DOPING SOURCE FOR GAAS GROWTH BY MOLECULAR-BEAM EPITAXY
    HORIKOSHI, Y
    FAHY, MR
    KAWASHIMA, M
    FURUKAWA, K
    FUJINO, M
    MATSUMOTO, N
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (3B): : L413 - L416
  • [23] DOPING OF ZNTE BY MOLECULAR-BEAM EPITAXY
    TAO, IW
    JURKOVIC, M
    WANG, WI
    APPLIED PHYSICS LETTERS, 1994, 64 (14) : 1848 - 1849
  • [24] INTERFACE AND DOPING PROFILE CHARACTERISTICS WITH MOLECULAR-BEAM EPITAXY OF GAAS - GAAS VOLTAGE VARACTOR
    CHO, AY
    REINHART, FK
    JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) : 1812 - 1817
  • [25] IONIZED BEAM DOPING IN MOLECULAR-BEAM EPITAXY OF GAAS AND ALXGA1-XAS
    MATSUNAGA, N
    SUZUKI, T
    TAKAHASHI, K
    JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) : 5710 - 5713
  • [26] TIN-DOPING EFFECTS IN GAAS FILMS GROWN BY MOLECULAR-BEAM EPITAXY
    WOOD, CEC
    JOYCE, BA
    JOURNAL OF APPLIED PHYSICS, 1978, 49 (09) : 4854 - 4861
  • [27] ZINC-ENHANCED BERYLLIUM REDISTRIBUTION IN GAAS/GAALAS GROWN BY MOLECULAR-BEAM EPITAXY
    HOUSTON, PA
    SHEPHERD, FR
    SPRINGTHORPE, AJ
    MANDEVILLE, P
    MARGITTAI, A
    APPLIED PHYSICS LETTERS, 1988, 52 (15) : 1219 - 1221
  • [28] CARBON DOPING IN MOLECULAR-BEAM EPITAXY OF GAAS FROM A HEATED GRAPHITE FILAMENT
    MALIK, RJ
    NOTTENBERG, RN
    SCHUBERT, EF
    WALKER, JF
    RYAN, RW
    APPLIED PHYSICS LETTERS, 1988, 53 (26) : 2661 - 2663
  • [29] EFFECTS OF HOT SOURCES ON RESIDUAL DOPING IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY
    SACKS, RN
    PASTORELLO, RA
    APPLIED PHYSICS LETTERS, 1988, 52 (12) : 996 - 998
  • [30] SI ATOMIC-PLANAR-DOPING IN GAAS MADE BY MOLECULAR-BEAM EPITAXY
    SASA, S
    MUTO, S
    KONDO, K
    ISHIKAWA, H
    HIYAMIZU, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (08): : L602 - L604