ROUGHNESS IN SI1-XGEX/SI SUPERLATTICES - GROWTH TEMPERATURE-DEPENDENCE

被引：9
|
作者：
HEADRICK, RL
BARIBEAU, JM
机构：
[1] CORNELL UNIV,SCH APPL & ENGN PHYS,ITHACA,NY 14853
[2] NATL RES COUNCIL CANADA,INST MICROSTRUCT SCI,OTTAWA,ON K1A 0R6,CANADA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期
关键词：
D O I：
10.1116/1.579827
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：782 / 786
页数：5
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