THE ADSORPTION OF PH3 ON SI(100) AND ITS EFFECT ON THE COADSORPTION OF SIH4

被引：81
作者：
YU, ML
MEYERSON, BS
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词：
D O I：
10.1116/1.572363
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：446 / 449
页数：4
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