DEPOSITION OF STOICHIOMETRIC MOS2 THIN-FILMS BY PULSED LASER EVAPORATION

被引：36

作者：

DONLEY, MS ^{[1
]}

MCDEVITT, NT ^{[1
]}

HAAS, TW ^{[1
]}

MURRAY, PT ^{[1
]}

GRANT, JT ^{[1
]}

机构：

[1] UNIV DAYTON,RES INST,DAYTON,OH 45469

来源：

THIN SOLID FILMS | 1989年 / 168卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90017-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：335 / 344

页数：10

共 27 条

[1]

BRIGGS D, 1983, PRACTICAL SURFACE AN, P511

[2] MORPHOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS [J].

BUCK, V .

WEAR, 1983, 91 (03) :281-288

[3] STRUCTURE AND DENSITY OF SPUTTERED MOS2-FILMS [J].

BUCK, V .

VACUUM, 1986, 36 (1-3) :89-94

[4] SPUTTERED MOS2 LUBRICANT COATING IMPROVEMENTS [J].

CHRISTY, RI .

THIN SOLID FILMS, 1980, 73 (02) :299-307

[5] ORIGIN OF FINE-STRUCTURE IN AUGER SPECTRUM OF SULFUR ON A NICKEL SURFACE [J].

COAD, JP ;

RIVIERE, JC .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1972, 331 (1586) :403-415

[6]

DIMIGEN H, 1979, THIN SOLID FILMS, V64, P221, DOI 10.1016/0040-6090(79)90513-3

[7]

FAVITSANOS BD, 1968, J ELECTROCHEM SOC, V115, P109

[8] EFFECTS OF LOW-ENERGY ARGON-ION BOMBARDMENT ON MOS2 [J].

FENG, HC ;

CHEN, JM .

JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1974, 7 (05) :L75-L78

[9] AUGER ELECTRON SPECTROSCOPY STUDIES OF CARBON OVERLAYERS ON METAL SURFACES [J].

GRANT, JT ;

HAAS, TW .

SURFACE SCIENCE, 1971, 24 (01) :332-&

[10] CHEMICAL EFFECTS IN AUGER-ELECTRON SPECTROSCOPY [J].

HAAS, TW ;

GRANT, JT ;

DOOLEY, GJ .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) :1853-&

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