MOLYBDENUM METALLIZATION SYSTEM FOR LARGE-SCALE INTEGRATED-CIRCUITS

被引：0

作者：

OIKAWA, H

WADA, T

AMAZAWA, T

机构：

[1] MUSASHINO ELECT COMMUN LAB,DIV LARGE SCALE INTEGRATED MEMORY DEV,SEMICONDUCTOR MEMORY TECHNOL,MUSASHINO,JAPAN

[2] MUSASHINO ELECT COMMUN LAB,DIV ELECTR EQUIPMENT DEV,INTEGRATED CIRCUIT SUBSYST SECT,MUSASHINO,JAPAN

来源：

REVIEW OF THE ELECTRICAL COMMUNICATIONS LABORATORIES | 1976年 / 24卷 / 5-6期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：407 / 417

页数：11

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