COMPOSITIONAL AND STRUCTURAL-ANALYSES FOR OPTIMIZING THE PREPARATION CONDITIONS OF SUPERCONDUCTING (LA1-XSRX)YCUO4-DELTA FILMS BY SPUTTERING

被引：21

作者：

KAWASAKI, M

FUNABASHI, M

NAGATA, S

FUEKI, K

KOINUMA, H

机构：

[1] Univ of Tokyo, Tokyo, Jpn, Univ of Tokyo, Tokyo, Jpn

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1987年 / 26卷 / 04期

关键词：

CRYSTALS - X-Ray Analysis - LANTHANUM COMPOUNDS - Electric Conductivity - SPUTTERING - SUPERCONDUCTING MATERIALS - Processing;

D O I：

10.1143/JJAP.26.L388

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Reaction conditions and structural requirements for the preparation of superconducting films of (La//1// minus //xSr//x)//yCuO//4// minus // delta (LSCO) by sputtering have been elucidated. There are slight deviations in the film compositions from the target composition, especially when the substrate temperature was high. Optimum conditions for the preparation of superconducting films by 50 Hz ac sputtering include the sputtering in argon without intentional mixing of oxygen, the heating of substrate at moderate temperatures, and the annealing of the as-deposited films in oxygen atmosphere at temperatures between 500 degree C and 850 degree C.

引用

页码：L388 / L390

页数：3