ELECTRON-TEMPERATURE IN RF DISCHARGE PLASMA OF CF4/N-2 MIXTURE

被引：4

作者：

KOBAYASHI, H ^{[1
]}

ISHIKAWA, I ^{[1
]}

SUGANOMATA, S ^{[1
]}

机构：

[1] YAMANASHI UNIV,FAC ENGN,KOFU,YAMANASHI 400,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 10期

关键词：

RF DISCHARGE; CF4; N-2; GAS MIXTURE; CF4/N-2; ELECTRON TEMPERATURE; SYNERGISM;

D O I：

10.1143/JJAP.33.5979

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In 1 MHz discharges of CF4/N-2 mixtures at a total pressure of 0.5 Torr, the synergistic variation of the electron temperature was observed with various gas mixing ratios. This variation at CF4 ratio of around 95% is ascribed to the enhancement of electronegativity, and another at CF4 ratio of around 20% is due to the expansion of the discharge region outward from the space between electrodes.

引用

页码：5979 / 5980

页数：2

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