BOHM VELOCITY WITH A 2-TEMPERATURE DISTRIBUTION OF NEGATIVE PARTICLES

被引:41
作者
BOSWELL, RW
LICHTENBERG, AJ
VENDER, D
机构
[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720
[2] UNIV CALIF BERKELEY,DEPT ELECTR ENGN,BERKELEY,CA 94720
[3] IBM CORP,YORKTOWN HTS,NY 10598
基金
美国国家科学基金会;
关键词
D O I
10.1109/27.134025
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A one-dimensional simulation of a low-pressure RF-driven discharge is used to verify the theoretical predictions of the Bohm velocity of ions at the sheath edge for a two-temperature electron distribution. They indicate that the Bohm velocity is geared to the cooler species, provided that it contains most of the electrons. A similar comparison has also been performed for an electronegative plasma.
引用
收藏
页码:62 / 65
页数:4
相关论文
共 6 条
[1]   SIMULATION OF PULSED ELECTROPOSITIVE AND ELECTRONEGATIVE PLASMAS [J].
BOSWELL, RW ;
VENDER, D .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :141-143
[2]   THE OPERATION OF LANGMUIR PROBES IN ELECTRO-NEGATIVE PLASMAS [J].
BOYD, RLF ;
THOMPSON, JB .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1959, 252 (1268) :102-119
[3]   THE LOW PRESSURE PLANE SYMMETRIC DISCHARGE [J].
HARRISON, ER ;
THOMPSON, WB .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1959, 74 (476) :145-152
[4]   THE BOHM CRITERION FOR RF DISCHARGES [J].
MEIJER, PM ;
GOEDHEER, WJ .
PHYSICS OF FLUIDS B-PLASMA PHYSICS, 1991, 3 (08) :1804-1806
[5]  
RIEMANN KU, 1991, I PHYS D, V24, P493
[6]   NUMERICAL MODELING OF LOW-PRESSURE RF PLASMAS [J].
VENDER, D ;
BOSWELL, RW .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1990, 18 (04) :725-732