PREPARATION AND STRUCTURE OF CARBON-FILM DEPOSITED BY A MASS-SEPARATED C+ ION-BEAM

被引：139
作者：
MIYAZAWA, T
MISAWA, S
YOSHIDA, S
GONDA, S
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 01期
关键词：
D O I：
10.1063/1.332862
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：188 / 193
页数：6
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共 38 条
[1]   ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].
AISENBERG, S ;
CHABOT, R .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+
[2]   A REVIEW OF RECENT WORK ON HARD I-C FILMS [J].
ANDERSSON, LP .
THIN SOLID FILMS, 1981, 86 (2-3) :193-200
[3]   PROPERTIES AND COATING RATES OF DIAMOND-LIKE CARBON-FILMS PRODUCED BY RF GLOW-DISCHARGE OF HYDROCARBON GASES [J].
ANDERSSON, LP ;
BERG, S ;
NORSTROM, H ;
OLAISON, R ;
TOWTA, S .
THIN SOLID FILMS, 1979, 63 (01) :155-160
[4]   ION-BEAM SPUTTER-DEPOSITED DIAMOND-LIKE FILMS [J].
BANKS, BA ;
RUTLEDGE, SK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :807-814
[5]   DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA [J].
BERG, S ;
ANDERSSON, LP .
THIN SOLID FILMS, 1979, 58 (01) :117-120
[6]   STRUCTURE AND PROPERTIES OF TRANSPARENT AND HARD CARBON-FILMS [J].
BEWILOGUA, K ;
DIETRICH, D ;
PAGEL, L ;
SCHURER, C ;
WEISSMANTEL, C .
SURFACE SCIENCE, 1979, 86 (JUL) :308-313
[7]   SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS [J].
ENKE, K .
THIN SOLID FILMS, 1981, 80 (1-3) :227-234
[8]   THE EFFECT OF ION-BOMBARDMENT ON CARBON-FILMS PREPARED BY LASER EVAPORATION [J].
FUJIMORI, S ;
NAGAI, K .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (03) :L194-L196
[9]  
GRIGROVICI R, 1972, J NONCRYST SOLIDS, V10, P793
[10]   DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1976, 38 (02) :L17-L19
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