SEM INVESTIGATION OF SURFACE-TOPOGRAPHY INDUCED BY A NEW 3S ION-BEAM SPUTTERING METHOD

被引：2
作者：
KOWALSKI, ZW
LASISZ, S
SMARDZ, S
机构：
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1987年 / 6卷 / 08期
关键词：
D O I：
10.1007/BF01729868
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：917 / 921
页数：5
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