X-RAY-ANALYSIS OF HEAT-TREATED TITANIUM NITRIDE FILMS

被引：40

作者：

VALVODA, V ^{[1
]}

CERNY, R ^{[1
]}

KUZEL, R ^{[1
]}

DOBIASOVA, L ^{[1
]}

MUSIL, J ^{[1
]}

POULEK, V ^{[1
]}

VYSKOCIL, J ^{[1
]}

机构：

[1] CZECHOSLOVAK ACAD SCI, INST PHYS, CS-18040 PRAGUE 8, CZECHOSLOVAKIA

来源：

关键词：

D O I：

10.1016/0040-6090(89)90725-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：201 / 210

页数：10

共 17 条

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[5] STRUCTURE OF TINX STUDIED BY ELECTRON-DIFFRACTION AND MICROSCOPY
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[6] PEARSON WB, 1967, HDB LATTICE SPACINGS, V1, P984
[7] STATES OF RESIDUAL-STRESS BOTH IN FILMS AND IN THEIR SUBSTRATES
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06): : 2801 - 2808
[8] VARIATIONS IN THE COLOR OF GROUP-IV B-NITRIDE FILMS
PERRY, AJ
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[J]. VACUUM, 1986, 36 (1-3) : 149 - 155
[9] MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .2. MORPHOLOGY AND STRUCTURE
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[J]. THIN SOLID FILMS, 1983, 105 (04) : 367 - 384
[10] STRUCTURE AND PROPERTIES OF TIN COATINGS
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[J]. THIN SOLID FILMS, 1985, 128 (1-2) : 21 - 44