THE MODIFICATION OF MATERIALS BY ION-IMPLANTATION

被引：5

作者：

DEARNALEY, G

机构：

来源：

PHYSICS IN TECHNOLOGY | 1983年 / 14卷 / 05期

关键词：

D O I：

10.1088/0305-4624/14/5/302

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：225 / 232

页数：8

共 50 条

[1] MATERIALS MODIFICATION BY MEV ION-IMPLANTATION
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[2] MATERIALS MODIFICATION - DOPING OF DIAMOND BY ION-IMPLANTATION
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