MATERIALS AND PROCESSES FOR PASSIVE THIN-FILM COMPONENTS

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作者：

GLANG, R

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1965年 / 2卷 / 05期

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中图分类号：

O59 [应用物理学];

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引用

页码：273 / &

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[1] MATERIALS AND PROCESSES FOR PASSIVE THIN-FILM COMPONENTS
GLANG, R
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[4] ELECTROSTATIC DISCHARGE (ESD) SENSITIVITY OF THIN-FILM HYBRID PASSIVE COMPONENTS
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[10] NUCLEATION PROCESSES IN THIN-FILM FORMATION
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