PRACTICAL LIMITATIONS TO ACCURACY IN A NULLING AUTOMATIC WAVELENGTH-SCANNING ELLIPSOMETER

被引：13

作者：

LOWE, AC ^{[1
]}

机构：

[1] IBM UNITED KINGDOM LTD,CTR MFG TECHNOL,SOUTHAMPTON,HAMPSHIRE,ENGLAND

来源：

关键词：

D O I：

10.1016/0039-6028(76)90441-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：134 / 147

页数：14

共 8 条

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[2]

BENNETT AH, 1973, Patent No. 54514

[3]

CHAMBERS DL, IN PRESS

[4] SOME APPLICATIONS OF THIN FILMS TO POLARIZATION DEVICES [J].

CLAPHAM, PB ;

DOWNS, MJ ;

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APPLIED OPTICS, 1969, 8 (10) :1965-&

FORGACS, G .

[6] SOME ASPECTS OF POLARIZER PERFORMANCE [J].

KING, RJ ;

TALIM, SP .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1971, 4 (02) :93-&

[7]

LOWE AC, 1976, IBM TECH DISCLOSURE, V18, P3433

SO, SS .