DEPOSITION OF TITANIUM NITRIDE ON SURFACE-HARDENED STRUCTURAL-STEEL BY REACTIVE MAGNETRON SPUTTERING

被引：16
作者：
ALJAROUDI, MY
HENTZELL, HTG
HORNSTROM, SE
BENGTSON, A
机构：
[1] LINKOPING UNIV,DEPT PHYS & MEASUREMENT TECHNOL,THIN FILM GRP,S-58183 LINKOPING,SWEDEN
[2] SWEDISH INST MET RES,S-11428 STOCKHOLM,SWEDEN
来源：
THIN SOLID FILMS | 1989年 / 182卷
关键词：
D O I：
10.1016/0040-6090(89)90252-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：153 / 166
页数：14
相关论文
共 16 条
[1]   THE INFLUENCE OF TITANIUM NITRIDE SPUTTER DEPOSITION TEMPERATURE ON SURFACE-HARDENED 2.5-PERCENT SILICON-IRON [J].
ALJAROUDI, MY ;
HENTZELL, HTG ;
BENGTSON, A .
THIN SOLID FILMS, 1989, 170 (02) :293-307
[2]   IN-DEPTH COMPOSITIONAL PROFILE ANALYSIS OF ALLOYS USING OPTICAL EMISSION GLOW-DISCHARGE SPECTROGRAPHY [J].
BELLE, CJ ;
JOHNSON, JD .
APPLIED SPECTROSCOPY, 1973, 27 (02) :118-124
[3]   A CONTRIBUTION TO THE SOLUTION OF THE PROBLEM OF QUANTIFICATION IN SURFACE-ANALYSIS WORK USING GLOW-DISCHARGE ATOMIC EMISSION-SPECTROSCOPY [J].
BENGTSON, A .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1985, 40 (04) :631-639
[4]   DEPTH PROFILING OF THIN-FILMS USING A GRIMM-TYPE GLOW-DISCHARGE LAMP [J].
BENGTSON, A ;
DANIELSSON, L .
THIN SOLID FILMS, 1985, 124 (3-4) :231-236
[5]   STUDIES OF SPUTTERING IN A GLOW-DISCHARGE FOR SPECTROCHEMICAL ANALYSIS [J].
BOUMANS, PWJ .
ANALYTICAL CHEMISTRY, 1972, 44 (07) :1219-&
[6]  
FUNNSJO G, 1980, SCAND J METALL, P205
[7]  
FUNNSJO G, 1980, SCAND J METALL, P199
[8]  
GLASKI FA, 1972, 3RD P INT C CHEM VAP, P340
[9]   GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR ANALYSIS OF THIN-FILMS [J].
GREENE, JE ;
WHELAN, JM .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) :2509-2513
[10]   NEW GLOW DISCHARGE LAMP FOR OPTICAL EMISSION SPECTRAL ANALYSIS [J].
GRIMM, W .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1968, B 23 (07) :443-&
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